Novellus CVD

• Parts
• Upgrades & Retrofits
• Services
• Available Equipment

Novellus CVD Parts

Novellus CVD Upgrades & Retrofits

• HDPCVD Centura Ultima+ Chiller Upgrade
• Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
• Repairs - Scope of Work
• RPS Lid Upgrades, from RF or microwave clean to NF3 remote plasma

Services

• Novellus C1 Robot Remanufacturing
• RPS Astron CIP - Refurbishment and Repair
• SMC Chiller Repair and Refurbishment

Looking for Available Equipment?