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Novellus CVD

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Novellus CVD Parts

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Novellus CVD Upgrades & Retrofits

  • HDPCVD Centura Ultima+ Chiller Upgrade
  • Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
  • Repairs - Scope of Work
  • RPS Lid Upgrades, from RF or microwave clean to NF3 remote plasma

Services

  • Novellus C1 Robot Remanufacturing
  • RPS Astron CIP - Refurbishment and Repair
  • SMC Chiller Repair and Refurbishment

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Semiconductor Support Services Co.

Semiconductor Support Services Co. Headquarters
4715 Steiner Ranch Blvd
Austin, TX 78732
Phone: +1-512-267-7087 | Fax: 512-267-7088
sales@semiconservice.com
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