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RPS - Remote Plasma Source solutions from SSSco

NF3 cleans for enhanced productivity, better Cost of Ownership, and lower emissions{filedir_10}platform-specialties/upgrades-retrofits/mks-paragon-rps-upgrade

Repairing PCB’s for AMAT systems - OFFER for end users

More PCB's are being made obsolete by the OEM, and so an effective repair service is essential for end users to maintain systems and avoid unwanted and very expensive OEM upgrades

New Upgrade for HDP chambers

Water Manifold PLUS for ULTIMA and ULTIMA +

Water Manifold PLUS for HDP ULTIMA and ULTIMA+

This part is commonly used and replaced in each HDP chamber. Users can now replace and upgrade with the latest Water Manifold PLUS part from SSSco. The original Teflon type material and design is replaced by durable and clean ceramic type material in a single peice design. This delivers better…

New functionality in latest software released for PDS users - V 1.007

Penulator Sentry version 1.007 is now available.

SEMI membership renewed - 6 years and counting

SYSCON compare built into PDS, empowers customers to improve procedures

PDS SENTRY uses SYSCON compare to help avoid mis-processing of wafers

New addition to Repair Center - Novellus C1 Robot

Customer robots - fully remanufactured with critical part replacement and CIP

Demo video of smart monitor switching

Novellus C1 Robot Remanufacturing

SSSco offers a full robot remanufacturing service for the Novellus C1 single arm robot assembly with a 1 Year Warranty. Our remanufacturing processes are of the highest quality and enable customers to reduce downtime and lower cost of ownership with higher reliability and higher performance. The comprehensive and high quality…

Novellus CVD

Heat Exchanger and Chiller Remanufacture - 1 Year Warranty

SSSco provides high quality remanufacturing services. Each unit undergoes detailed strip down, critical part replacement, and final test. SSSco supplies a 1 year warranty. Models serviced, detail provided below; Upgrades are also available SMC Chillers AMAT 0, AMAT 1 STEELHEAD 0, 1 NESLAB III (Endura) HX150, HX 300 Please contact…

DxZ upgrade,  Constant Voltage Gradient , CVG+, released for sale

Save time on each DxZ chamber lid opening.

CVG+ -  Constant Voltage Gradient upgrade

The constant voltage gradient CVG gas feedthrough operates between the RF power electrode and ground in a DxZ chamber lid. The CVG isolates process gases from mixing, ionizing, and forming a plasma prior to entering the process chamber. The new CVG+ eliminates parts dis-assembly and re-assembly each time the lid…

Pro Monitor update; New pen design released

New more robust Pro pen

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Gate Valve Refurbishment

SSSco offers full refurbishment of gate valve assemblies, including throttling gate valves. Refurbishment includes: Replacement of all seals (vacuum and pneumatic) Vacuum leak check; electrical, pneumatic, and actuation tested Inspection and cleaning of the entire assembly Stepper motor inspection and testing (if equipped) Six month warranty Example part numbers include:…

Slit Valve Refurbishment

SSSco offers full refurbishment of AMAT slit valve, and gate valve assemblies. Slit Valve Refurbishment includes: Replacement of all seals (vacuum and pneumatic) Vacuum leak check of bellows Pneumatic actuation and sensor tests, and replacement if necessary Inspection and cleaning of entire assembly, including repair of defects Lubrication of actuator…

Upgrade existing Endpoint Computer (EPC) - Centura and P5000

Endpoint Computers are a critical part part of AMAT etch systems. These become unreliable as they get older. SSSco has developed upgrades to improve performance and return to like-new condition. The whole unit is upgraded, tested and refurbished. Upgrade and Refurbishment (1 Year Warranty) Add EPC Remote, browser view/control New…