Safe. Simple. Scrubbing You Can Trust. The EPICREW Scrubber provides a reliable, cost-effective solution for gas abatement using legacy water scrubber technology. Designed for stable operation and high-efficiency removal of HCl and similar process gases, the EPICREW Scrubber delivers outstanding performance with significantly reduced maintenance and upgraded features as standard.…

Rotation Assembly Refurbishment & Upgrade

Precision. Performance. Longevity. SSS Co offers a comprehensive rotation assembly refurbishment and upgrade service designed to enhance tool performance, extend service life, and improve reliability. Our process targets key wear points and integrates new technology for greater throughput, accuracy, and maintainability. Refurbishment Scope & Upgrades Simple modification: swap out air-type…

HP Robot Wrist Improvement Kit

Enhanced Wrist Bearings for AMAT Robots The SSS Co HP Robot Wrist Improvement Kit addresses the mechanical and contamination issues found in standard AMAT® robot wrist designs. Our improved bearing system enhances wafer loading reliability, simplifies installation, and significantly reduces particle generation—all at one-third the cost of OEM parts. Why…

Edge Zoom Wafer Tracking System

Precision Insight at Process Temperature EPICREW’s Edge Zoom system provides advanced, in-situ monitoring of wafer position during high-temperature processing. With gap and motion analysis capabilities, Edge Zoom gives engineers the data they need to understand, debug, and optimize process performance. Its integration with factory data networks makes it a powerful…

Dual Pyrometer Measurement System

Advanced Thermal Monitoring for Process Consistency SSS Co’s Dual Pyrometer System enables simultaneous measurement of both wafer and dome temperatures during thermal processing. With real-time correction algorithms and integrated software, the system ensures more consistent power delivery, improved control, and better insight into process behavior. What the System Does Measures…

ASM Epsilon™ E-FIT Plus Solution

Extend Platform Life. Modernize Performance. Simplify Control. SSS Co delivers a comprehensive upgrade package for ASM Epsilon™ systems - designed to enhance reliability, improve process control, and extend tool life. Our controller retrofit and software solution modernizes every facet of the system, while mechanical upgrades enhance wafer handling and reduce…

SSSCo achieves Goal Supplier Compliance status

SSSCo qualifies for several compliance verifications using the IntegrityNext platform

AABA-70264 New HP/HP+ Robot Drivers

Drop in replacements for the OEM parts

Upgrade for EPI and Poly SCR Drivers

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New Robot Drivers

We offer completely new 2nd source Robot Driver sets (upper and lower) for the AMAT Centura and Endura platforms. These highly reliable critical components are essential to accurately transfer wafers within the Centura or Endura system. The original robot drivers from the OEM can be repaired, but after many years…

AMAT MUX PCB REPAIRS

Another High Value Repair Service from SSSco

DPS Metal Etch Throttle Valve - Refurbishment service

Professional refurbishment 5-Phase Throttle Valve

New DC Power Supply For Centura Endura AABA-20498

New 2nd source DC +/- 15V PSU for AMAT

AMAT 0, AMAT 1, Upgrade to new SMC

Old AMAT 0 and AMAT 1 heat exchangers are increasingly unreliable, and consume large amounts of power. The latest SMC unit is the INR-498-012E-X007, and includes analog, CHX and DNET communications. SSSco supplies brand new SMC chillers which are qualified plug-in replacements, with new control cables. Enquire here

Remanufactured Centura EPI 200mm for sale

Fully Remanufactured and Tested to as-new specification Available now, with install and warranty Enquire here

Replace obsolete AMAT0, AMAT1 chillers

New SMC chillers save downtime and energy consumption

DPS Metal Etch, New Chamber Body

DPS Metal Etch chambers are very popular at 200mm and 150mm, for many years and many applications. The original AMAT chamber body part number 0040-02544 can now be replaced with a new equivalent chamber body. After many years of production, chamber bodies can become difficult to maintain, and start to…

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