ALL ENQUIRIES TO equipment@semiconservice.com Mainframe Type: Centura Phase II OTF, Fast Wafer Mapping Chamber Position/Type: A: Ultima TE, RPS Astron-I, ENI RF Rack B: Ultima TE, RPS Astron-I, ENI RF Rack C; Blank D; Blank E; Multislot Cooldown F; Orienter Loadlocks Narrow Body Year 1999 Wafer Size 200mm Robot HP+…

Authorized SMC Chiller Repairs at SSSco

New service for SMC chiller repair

Harmonic Arm Drive Repair

For Lam standalone etch tools, such as Rainbow

New PCB’s for AMAT Systems

Replacement for obsolete and difficult to find boards

100mm Ceramic ESC available

For AMAT etch chambers, MxP Oxide or Poly

SMC Chiller Repair and Refurbishment

Approved SMC Chiller refurbishment SSSco is approved by SMC as the USA Refurbisher for SMC chillers SSSco uses highest quality processes and OEM parts SSSco services all current models of SMC chiller SSSco also supplies New Chiller Upgrades, and has a stock of used chillers for sale. Key Benefits of…

PDS - now available for AMAT Producer

The Penulator™ Data System 〈PDS〉 is now available for all AMAT Producer systems

SMC Chiller Repair and Refurbishment

SSSco provides high quality fast turnaround service

NEW V452 Boards now available

SSSco restarts supply of this critical part

New V452 Single Board Computer SBC PCB’s

SSSco supplies new V452 SBC boards, manufactured to order and supplied with warranty and ongoing support. The Single Board Computer V452 is the critical CPU board for many AMAT systems. New V452 boards are manufactured for SSSco by the Original Part Manufacturer OPM for use in AMAT Centura, Endura, Producer…

Lam Etch - ENI RF Match Repair

High quality refurbishment for LAM and ENI RF Match including parts 685-096202-002, 685-140283-011, 685-140283-012, MWD-25LD-06, MWD-25LD-07 All ENI RF Matches are rebuilt to exacting standards to ensure reliability and performance. All matches are thoroughly tested to verify proper operation and Tuning Range. Please contact us to arrange for your RF…

Harmonic Arm Drive refurbishment

Harmonic arm drives are used on all LAM research standalone platforms to accurately and reliably place the wafer. It is essential that a high quality refurbishment is completed for parts including 853-012123-001, 853-012123-004, 853-012123-500, 853-012175-001, 853-012175-003. Incoming inspection and cleaning is done by highly experienced engineers. All Harmonic Arm Drives…

Gate Drive Assembly Refurbishment

Gate Drive Assemblies for LAM Research standalone tools, a high quality refurbishment is completed for parts including 853-012200-002, 853-012261-001, 853-012875-001, 853-442064-002 Incoming inspection and cleaning is done by highly experienced engineers. Each assembly is then refurbished and thoroughly tested to meet specification including; Air cylinder, bearings, retaining pins and pneumatic…

NEW High quality refurbishment of AMAT RF MATCH’s

CVD and Etch RF Match repairs and refurbishment

AMAT RF Match Refurbishment

Highest Quality refurbishment of widely used RF Match; including AMAT CVD (xL, DxZ, WxZ). AMAT ETCH (MxP family) 0010-09750 0010-09416 0010-35444 Highest specification components are used, to meet or exceed original OEM specifications. Our process is; ->Incoming inspection -> cleaning -> report -> refurbishment -> thoroughly test. Refurbishment includes; Replace…

NEW RELEASE; Sentry software for PDS users, version 1.014

Latest software and manuals release for users of PDS

NEW REPAIR SERVICE; Lam RF Matches - DSQ match, TMatch, Minimatch, 9600 Match

High Quality Repair service to highest specification

LoFAT Sled Upgrade and Remanufacture

The LoFAT sled is the RF Tune system widely used on older LAM chambers, and is known to suffer from reliability issues due to high operating temperatures. Reliabiilty upgrades are performed during remanufacturing by SSSco, dramatically increasing lifetime. Including 853-025903-001, 853-025903-002. Incoming inspection and cleaning is done by highly experienced…

Lam Mini-Match Refurbishment

High quality refurbishment for all types of mini-match, both ESC and Non-ESC Lam systems. This includes part numbers 853-025083-001, 853-025083-003, 853-025083-002, 853-025083-004, 853-025083-022, 853-250001-021, 853-250001-023, 853-250001-024, 853-250001-121, 853-330951-001, 853-330951-021, 853-015130-002, 853-015130-002, 853-015130-003, 853-015130-004, 853-015130-006, 853-015130-102, 853-015130-103, 853-015130-202, 853-015130-204, 853-015130-205, 853-015130-503 Incoming inspection and cleaning is done by highly experienced engineers.…

DSQ RF Match Refurbishment

High quality refurbishment for DSQ RF match. Including parts 853-025735-001, 853-025735-004, 853-025735-008. Incoming inspection and cleaning is done by highly experienced engineers. Each match is then refurbished and thoroughly tested to meet specification including; Variable capacitors, fixed HV capacitors, cooling fan, replaced. Silver plate hardware removed, cleaned, and inspected. Copper…

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