SSSco provides replacement SCR assemblies and switch gear for AMAT Centura RTP XE and XE+ systems. Parts are drop-in replacements for the original unit. Replaces the part numbers listed below. Description OEM # SSS Co # RTP XE/XE + SCR Driver Repair Exchange required 0190-03485 ABJA-03485 Fuse 600VAC 70A 0910-01185…

RTP Xe Temperature Probe Refurbishment

SSSco refurbish the AMAT RTP Xe Temperature Probe. Optical probe is replaced Seals replaced Mechanical depth is set Optical transmission and bandwidth tested to match new part This part is typically discarded but can be refurbished to like new condition by SSSco This part is provided on an exchange basis…

Monochromator Refurbishment

SSSco provides full refurbishment for Monochromators used by AMAT Etch systems. Our Refurbishment process includes: Photo Multiplier Tube & Power Supply Fiber Optic Cable Stepper Motor Calibration lamp Holographic Grating Mechanical assembly Monchromator units should provide years of trouble free service but can degrade over time. This causes errors due…

AMAT0, AMAT1 Heat Exchanger Remanufacturing

SSSco remanufactures AMAT 0 and AMAT 1 heat exchangers SSSco stocks OEM parts, for a fast turnaround repair service SSSco manufactures critical components including circuit boards and resistivity sensors. Key Benefits of remanufacturing Fully refurbished and tested for reliable operation Patented DI sensor “Rezsense” included 12 months warranty Remanufacturing includes;…

Neslab III Heat Exchanger Remanufacturing

SSSco provides remanufacturing of Neslab® III heat exchangers used on

PVD Magnet Repair

SSSco provides replacement and refurbishment for many AMAT PVD magnet assemblies. Magnets that we repair include: 0010-21810 G-12 Durasource Magnet 0010-21403 TTN Durasource Magnet 0010-20768 G-12 8” Magnet 0010-20225 AL A-Type Magnet 0010-20224 AL A-Type 6” Magnet 0010-20258 Ti A- Type Magnet 0010-20328 Ti Durasource Magnet Before Refurbishment: After SSSco…

ENI RF Rack - replaces ETO rack

SSSco manufactures and delivers new ENI racks for AMAT HDP-CVD New smaller rack, harnessing and integration Replaces obsolete ETO generator racks on Applied Materials HDP CVD systems Nova ENI generators for higher reliability and higher power processing Benefits Smaller footprint. Better process window with higher powers Greatly increased reliability, less…

RPS Lid Upgrades, from RF or microwave clean to NF3 remote plasma

SSSco provides a range of RPS upgrade kits for AMAT CVD chambers. RPS clean can be used on P5000, Centura and Producer platforms, and replaces RF or microwave clean systems. Benefits include; Better chamber clean and particle reduction Longer periods between chamber clean Reduction in use of expensive etch gasses…

Chamber Retrofit

SSSco provides remanufactured chamber retrofit solutions for AMAT Centura, Endura, P5000 and Producer systems. SSSco installs worldwide and with custom integration to provide a turnkey solution. All chambers are manufatured in strict compliance with SSSco's 5S procedures and high quality standards ensuring quick installation and reliable operation for years to…

Bake out Lamps

SSSco provides OEM compatible replacement bake out lamp assemblies and feed through for the PVD chamber. Contact SSSco Sales for more information. 1010-01254 500W Quartz Lamp 0020-20488 Bakeout Lamp Clamp 0040-20048 Lamp Feedthru (note: these are conflat seal feedthroughs)

DI Resistivity Sensor

Rezsense is a proprietary SSSco design to replace the DI sensor on AMAT-0 and AMAT-1 heat exchanger systems. Rezsense has 2 versions; AABA-S0004 (Brass) and AABA-S0003 (SST) Rezsense replaces the following AMAT part numbers; 0010-75478; 0010-75311; 0010-70065; and 0010-00201 Key Benefits of the new sensor Drop-in replacement Solid gold terminals…

PVD Chamber Interconnect Boards

SSSco stocks direct replacement PVD chamber interconnect boards for all chamber types. AMAT# SSS Co Replacement Part# DESCRIPTION 0100-20004 ABAA-20004 CHAMBER INTERCONNECT 0100-20313 ABAA-20313 CHAMBER INTERCONNECT More boards can be found here Made in USA For more information contact SSSco

Site Policies

SSS Co (“we” or “us”) values its visitors’ privacy. This privacy policy is effective July 1, 2013 it summarizes what information we might collect from a registered user or other visitor (“you”), and what we will and will not do with it. Please note that this privacy policy does not…

RTP Xe Process Kits

SSSco provides replacement process kit parts for AMAT Centura RTP XE and XE+ systems. Direct replacements available for the following original part numbers: Description OEM # SSS Co # RTP XE/XE+ Edge Ring 0200-36118 ACAA-36118 RTP XE/XE+ Support Cylinder 0200-00289 ACAA-00289 2mm Window 0200-35145 ACAA-35145 4mm Window 0200-35265 ACAA-35265 ATM…

Legal Disclaimers

The following trademarks used on this web site are property of Applied Materials, Inc. No current affiliation or endorsement with Applied Materials, Inc. is stated or implied. ALPS® APPLIED™ APPLIED MATERIALS® applied materials® CENTURA® CENTURA HDP™ DPS® DPS CENTURA® DURASOURCE® DXZ® ELECTRA® ELECTRA CU® E-MAX® ENDURA® H.O.T.™ MESA™ MIRRA® MIRRA…

HTF Dual Seal Pumps

SSSco provides replacement HTF Dual Seal pumps and parts for AMAT Centura HTF EPI and Poly systems. Parts are drop in replacements for the following part numbers: Description OEM # SSS Co # Repair kits N/A Call Pump 0010-76475 0010-35276 ABAA-76475 For more information or to request a quote on…

HTF SCR Drivers

SSSco provides a service to repair, or install new HTF Drivers in AMAT systems. SSSco provides replacement SCR assemblies and switch gear for AMAT Centura HTF EPI and Poly systems, including the models; P1215 P1166 P1166B P1164A P1136 P1145. These parts are drop-in replacements for the original unit. Available in…

HTF Rotation Assembly

SSSco provides replacement parts for AMAT Centura HTF EPI and Poly rotation assemblies. Parts are drop-in replacements for the following part numbers: Description OEM # SSS Co # BELLOWS ASSY, UPPER MAG COUPLED ROTATION 0040-87019 AADA-87019 BELLOWS ASSY, LOWER MAG COUPLED ROTATION 0040-87020 AADA-87020 Motors 0090-00982 AAJA-00982 Rotation PCB (exchange)…

HTF Gate Valve and Ball Valve

SSSco provides replacement gate valve and ball valve parts for AMAT Centura HTF EPI and Poly systems. Parts are drop-in replacements for the following part numbers: Description OEM # SSS Co # Gate Valve (8300060) 3870-01893 CHGA-01893 Gate Valve Rebuild Kit NA DRKS-SSSSS Ball valve A&N D-4150-QF40-AM (8300065) 0190-01361 ABJA-01361…

HTF Lamp Module Reflectors

SSSco provides replacement lamp module reflectors for AMAT Centura HTF EPI and Poly systems. Parts are drop-in replacements for the following part numbers: Description OEM # SSS Co # CONE, UPPER LAMP MODULE 0020-35680 AABA-35680 Shield Dome Neck 0020-35625 AABA-35625 Cover Shield lamp base Upper 0020-35665 AABA-35665 Cover Shield lamp…

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