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SMC Chiller Repair and Refurbishment
Approved SMC Chiller refurbishment SSSco is approved by SMC as the USA Refurbisher for SMC chillers SSSco uses highest quality processes and OEM parts SSSco services all current models of SMC chiller SSSco also supplies New Chiller Upgrades, and has a stock of used chillers for sale. Key Benefits of…
PDS - now available for AMAT Producer
The Penulator™ Data System 〈PDS〉 is now available for all AMAT Producer systems
SMC Chiller Repair and Refurbishment
SSSco provides high quality fast turnaround service
NEW V452 Boards now available
SSSco restarts supply of this critical part
New V452 Single Board Computer SBC PCB’s
SSSco supplies new V452 SBC boards, manufactured to order and supplied with warranty and ongoing support. The Single Board Computer V452 is the critical CPU board for many AMAT systems. New V452 boards are manufactured for SSSco by the Original Part Manufacturer OPM for use in AMAT Centura, Endura, Producer…
Lam Etch - ENI RF Match Repair
High quality refurbishment for LAM and ENI RF Match including parts 685-096202-002, 685-140283-011, 685-140283-012, MWD-25LD-06, MWD-25LD-07 All ENI RF Matches are rebuilt to exacting standards to ensure reliability and performance. All matches are thoroughly tested to verify proper operation and Tuning Range. Please contact us to arrange for your RF…
Harmonic Arm Drive refurbishment
Harmonic arm drives are used on all LAM research standalone platforms to accurately and reliably place the wafer. It is essential that a high quality refurbishment is completed for parts including 853-012123-001, 853-012123-004, 853-012123-500, 853-012175-001, 853-012175-003. Incoming inspection and cleaning is done by highly experienced engineers. All Harmonic Arm Drives…
Gate Drive Assembly Refurbishment
Gate Drive Assemblies for LAM Research standalone tools, a high quality refurbishment is completed for parts including 853-012200-002, 853-012261-001, 853-012875-001, 853-442064-002 Incoming inspection and cleaning is done by highly experienced engineers. Each assembly is then refurbished and thoroughly tested to meet specification including; Air cylinder, bearings, retaining pins and pneumatic…
NEW High quality refurbishment of AMAT RF MATCH’s
CVD and Etch RF Match repairs and refurbishment
AMAT RF Match Refurbishment
Highest Quality refurbishment of widely used RF Match; including AMAT CVD (xL, DxZ, WxZ). AMAT ETCH (MxP family) 0010-09750 0010-09416 0010-35444 Highest specification components are used, to meet or exceed original OEM specifications. Our process is; ->Incoming inspection -> cleaning -> report -> refurbishment -> thoroughly test. Refurbishment includes; Replace…
NEW RELEASE; Sentry software for PDS users, version 1.014
Latest software and manuals release for users of PDS
NEW REPAIR SERVICE; Lam RF Matches - DSQ match, TMatch, Minimatch, 9600 Match
High Quality Repair service to highest specification
LoFAT Sled Upgrade and Remanufacture
The LoFAT sled is the RF Tune system widely used on older LAM chambers, and is known to suffer from reliability issues due to high operating temperatures. Reliabiilty upgrades are performed during remanufacturing by SSSco, dramatically increasing lifetime. Including 853-025903-001, 853-025903-002. Incoming inspection and cleaning is done by highly experienced…
Lam Mini-Match Refurbishment
High quality refurbishment for all types of mini-match, both ESC and Non-ESC Lam systems. This includes part numbers 853-025083-001, 853-025083-003, 853-025083-002, 853-025083-004, 853-025083-022, 853-250001-021, 853-250001-023, 853-250001-024, 853-250001-121, 853-330951-001, 853-330951-021, 853-015130-002, 853-015130-002, 853-015130-003, 853-015130-004, 853-015130-006, 853-015130-102, 853-015130-103, 853-015130-202, 853-015130-204, 853-015130-205, 853-015130-503 Incoming inspection and cleaning is done by highly experienced engineers.…
DSQ RF Match Refurbishment
High quality refurbishment for DSQ RF match. Including parts 853-025735-001, 853-025735-004, 853-025735-008. Incoming inspection and cleaning is done by highly experienced engineers. Each match is then refurbished and thoroughly tested to meet specification including; Variable capacitors, fixed HV capacitors, cooling fan, replaced. Silver plate hardware removed, cleaned, and inspected. Copper…
T-Match Refurbishment
High quality refurbishment for LAM T-match. Including parts 853-032294-001, 853-032294-002, 853-032294-003, 853-032294-004, 853-032294-400, 853-032294-603 Incoming inspection and cleaning is done by highly experienced engineers. Each match is then refurbished and thoroughly tested to meet specification including; Top plate conversion to reduce arcing Silver plate hardware is removed, cleaned, and inspected…
TCP 9600 Match Refurbishment
High quality refurbishment for LAM TCP RF match. Including parts 853-031685-001, 853-031685-002, 853-031685-003, 853-032190-006, 853-032190-008, 853-032190-306. Incoming inspection and cleaning is done by highly experienced engineers. Each match is then refurbished and thoroughly tested to meet specification including; Replace variable capacitors, HV fixed capacitor, bearings, limit switch Silver plate hardware…
Site de SSSco maintenant en langue française
Nouveau support pour les clients francophones de SSSco.
New service for DPS Poly Throttle Valve
DPS Poly Etch chambers, now SSSco offers a full refurbishment and repair service
DPS Poly Throttle Valve Rebuild 0010-39645
SSSco now rebuilds, tests and warranties assemble 0010-39645 DPS Poly Throttle Valve. This critical part has been in use in many cases for >10 years, and requires a periodic rebuild to ensure that particle performance and chamber reliability and maintained. Contact us for a quotation. SSSco use qualified parts and…