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SSSco appoints new General Manager

Harry Engwer joins the management team at SSSco

RPS Upgrade for Producer 300mm and 200mm

The latest Paragon AX7700 RPS unit deliver 6 Liters of NF3

Paragon RPS Upgrade Kits

SSSco upgrades AMAT 200mm and 300mm CVD chambers with the latest Paragon NF3 RPS remote plasma systems. Paragon RPS units are installed on HDP Ultima 200mm and 300mm, and on Producer 200mm and 300mm chambers. This is an upgrade from Astron 2L or 3L models. Benefits include; •Better reliability and…

EPI and HTF Chambers, lamp module repair service

Customers using EPI chambers and HTF chambers such as poly, can have these repaired at SSSco to like-new condition

EPI Lamp Module Repair Service

Upper and Lower lamp modules are a critical part of the EPI chamber. After extensive use these can become damaged or cause unwelcome process shift, due to component damage or a wide range of patch repairs to cables, fixings or enclosures. SSSco has established a full repair service for both…

Thank You

Thank you for your request. We will reply within one business. For immediate help, please call us at +1-512-267-7087 and ask for customer service. SSS Co.

Ultima+ Chamber upgrades

Ultima+ is a chamber for HDP-CVD, which was upgraded from the original Ultima version and added many new features including; The RF system is upgraded from ETO racks to new ENI Nova racks and generators for higher RF power and stability. The chamber ckean is upgraded from microwave to RPS…

Penulator monitor product range expanded for all Thermawave Optiprobe

The proven and globally adopted Penulator monitors for replacement machine control screens now reaches even more machine types

Improved decoders for SYSCON and ERROR LOG files. New release of SENTRY software

Latest upgrade to the SSSco PDS system - which upgrades AMAT equipment for remote automatic access and data management

Replace floppy drive U2 with PDS Drive

PDS Drive replaces AMAT Floppy Drive - adds significant new capabilty

AMAT XR Implanter, replacement control screen

Pro monitor replaces older, unreliable control screens on 9500 Xr and Xr series

Happy New Year and Best Wishes for 2017

Thanks for your support in 2016!

Best in Class - Etch Monochromator Refurbishment with a 1 Year Warranty

Part of the AMAT Etch endpoint, and a critical system for all etch processes

Ceramic ESC TEL 8500

The latest CESC technology for TEL 8500 etch tools. Improved design and materials mean better lifetime and process performance. Enquire <back

Ceramic ESC AMAT Ultima and Ultima+

150mm. 200mm. 300mm. The latest CESC technology for AMAT HDPCVD chambers. Fits directly onto OEM cathode. Consistent high quality every CESC. Excellent quality control. Extensive final test before ship to customer. Enquire. Replaces OEM part numbers including 0040-18208, 0040-18219. <BACK

Ceramic ESC AMAT DPS+ Metal Etch and Poly Etch

The latest CESC technology for AMAT DPS+ Metal Etch and Poly Etch chambers. The OEM ESC design is Johnson Rahbeck style using AlN plate, which over time can show wafer sticking and junping due to surface condition changes. The SSSco CESC is Coulombic design and a single peice and delivers…

Ceramic ESC AMAT for DPS Metal and Poly Etch Chambers

The latest CESC technology for AMAT DPS Metal Etch and Poly Etch chambers. The SSSco CESC fits onto OEM polyimide cathode with no change necessary. The improved design and better material means better process performance and lifetime. Particles are reduced as no sticking or breakdown of polyimide, microarcing is eliminated.…

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