P5000
SSSco supports AMAT P5000 systems and chambers since 2003, delivering high value upgrades, repairs, parts and services
P5000 Parts
SSSco ensures high quality parts and modules are delivered to precisely match customer requirements. In addition, we have a large inventory of surplus parts in our Parts Search
Search for more partsUpgrades & Retrofits
Improved performance and extended lifetime
- AMAT 0, AMAT 1, Upgrade to new SMC
- Ceramic ESC AMAT for Tungsten Etchback MkII and WEB
- Ceramic ESC AMAT MxP chambers, all types
- Ceramic ESC Super-e chamber
- DI Resistivity Sensor
- EPC Remote - New Etch Endpoint Computer
- Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
- New V452 Single Board Computer SBC PCB’s
- PDS Penulator Data System
- PDS Remote
- Penulator Pro Monitor
- Penulator™ Upgrades
- Repairs - Scope of Work
- RPS Lid Upgrades, from RF or microwave clean to NF3 remote plasma
- Upgrade existing Endpoint Computer (EPC) - Centura and P5000
Services
SSSco partners with customers and qualified suppliers to deliver our services around the world.
- AMAT RF Match Refurbishment
- AMAT0, AMAT1 Heat Exchanger Remanufacturing
- Customer Support Services
- Gas line orbital welding service
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- HP, HP+, VHP Robot Driver Rebuild and Repair
- Monochromator Refurbishment
- Orienter Chamber Laser Refurbishment
- PCB Repair Service
- Replacement AMAT PCB Circuit Boards
- RPS Astron CIP - Refurbishment and Repair