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Implanter - General Parts

P/No AMAT P/N IMPLANTER GENERAL PARTS Description Area Source XR Implanter models DKT-001 n/a 9500-XR120 exhaust duct, dry pump, S shape for 9500/9500xR vacuum system OPM PI9500-xR DKT-002 n/a 9500-XR120 exhaust duct, dry pump, straight for xR80, xR120, xR vacuum system OPM xR80,Leap,120 DKT-004 n/a 9500-XR120 exhaust duct, dry pump,…

Implanter Wafer Loader Parts

P/No AMAT P/N WAFER LOADER PARTS Description Area Source XR Implanter models ARM-001 0040-95199 Hollow Gripper, Y-arm, 200mm Waferloader OPM PI9500-xR BRG-004 3060-00229 guide bearing, blade box assy Waferloader OPM PI9500-xR120 BRG-005 3060-00230 drive bearing, blade box Waferloader OPM PI9500-xR120 BRG-006 3060-00231 guide bearing, Cassette Indexer Waferloader OPM PI9500-xR120 BRG-007…

PDS SENTRY Software - New Release V3.0

V3.000 Release of SENTRY software available for download

Implanter Scan Arm Parts

P/No AMAT P/N SCAN ARM PARTS Description Area Source XR Implanter models BRG-001 3500-90027 lock nut, Scan Drive shaft ball screw, upper Scan Arm OPM PI9500-xR120 BRG-002 3060-90075 bearing, Scan Drive shaft ball screw, upper Scan Arm OPM PI9500-xR120 BRG-003 3060-90076 bearing, Scan Drive shaft ball screw, lower Scan Arm…

Implanter Beamline Parts

P/No AMAT P/N BEAMLINE PARTS Description Area Source - OPM, 2nd source, or Custom XR Implanter models GRP-001 n/a AMAT Implanter9500-XR120 Graphite Inner, flight tube, all models (specify on order) Beamline Custom ALL GRP-002 n/a AMAT Implanter9500-XR120 Graphite Outer, flight tube, all models (specify on order) Beamline Custom ALL MTR-003…

DPS Etch Chambers - DTCU Refurbishment

DPS Poly Chamber repairs and refurbishment for the DTCU

DPS Chamber, Refurbishment of DTCU

SSSco refurbishes and repairs the Dome Temperature Control Unit (DTCU) for DPS Poly etch chambers. The DTCU is a critical complex system which may be obsolete, and in most cases is over 15 years old. SSSco uses qualified materials and quality assurance procedures to make sure each DTCU is functioning…

Remote Working - PDS Remote enables AMAT Users

PDS Remote enables screen sharing if the AMAT systems

Open For Business - Globally

SSSco has maintained operations from Austin

New equipment for sale - CMP and PVD

AMAT 200mm, Mirra Mesa CMP system and Endura PVD system

Quality Policy

SSSco. is committed to delivering on-time, defect-free products and services that keep semiconductor equipment running. We build quality in everything we do from our business processes to our individual workspaces. We measure our performance and drive continual improvement to meet customer requirements. We are passionate about customer experience. We strive…

Repair Center - Scope of Work update

SSSco. commitments when using our repair center

Repairs - Scope of Work

SSSco. provides services to help customers sustain and improve production equipment. The following Scope of Work (SOW) describes our Repair Services and our service levels. SSSco. Priorities Rapid response, feedback and turnaround times Consistency and reliability Resolution through experience and innovation Fair and reasonable pricing Repair Tasks Understand customer problems…

DPS Poly Chamber -  Lid Hoist

Safe single-person lifting for DPS Poly Chamber DTCU

TGV Throttling Gate Valve Upgrade for DPS Poly

This upgrade is available for DPS Poly etch chambers on AMAT Centura platforms, and replaces the older Standard Gate valve and the NSK Throttle Valve. Benefits include; Reduced maintenance costs, reduced parts, saved time on rebuilds Removal of plunger means lower particles Reliable pressure control with turbo isolation Faster servo…

Centura HDPCVD

ALL ENQUIRIES TO equipment@semiconservice.com Mainframe Type: Centura Phase II OTF, Fast Wafer Mapping Chamber Position/Type: A: Ultima TE, RPS Astron-I, ENI RF Rack B: Ultima TE, RPS Astron-I, ENI RF Rack C; Blank D; Blank E; Multislot Cooldown F; Orienter Loadlocks Narrow Body Year 1999 Wafer Size 200mm Robot HP+…

Authorized SMC Chiller Repairs at SSSco

New service for SMC chiller repair

Harmonic Arm Drive Repair

For Lam standalone etch tools, such as Rainbow

New PCB’s for AMAT Systems

Replacement for obsolete and difficult to find boards

100mm Ceramic ESC available

For AMAT etch chambers, MxP Oxide or Poly

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