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PDS Remote

PDS Remote - for Centura, Endura, P5000, Producer, AMAT Implanter Remote working and video meetings are now normal for businesses. PDS Remote is an essential product for companies using AMAT Legacy systems; How does it work? PDS Remote connects into the AMAT video circuit, connects to all monitors including AMAT…

NEW PRODUCT; Penulator SSD Solid State Drive

Replacement for U0 system hard drive

Penulator SSD - Solid State Drive, U0

Centura, Endura, P5000, Producer SSD replaces SCSI hard drive U0 on Centura, Endura, P5000 and Producer, one universal part number for all system types. SSD uses higherst quality Single Level Cell SLC memory on an SD card, which is highly durable with automatic wear levelling to monitor memory cell usage.…

PEO block material improves performance and lifetime of RPS units

What is PEO? The latest block material from MKS for the popular Astron RPS family

Ceramic ESC AMAT for Tungsten Etchback MkII and WEB

The latest CESC technology for all AMAT MxP polyimide ESC chambers. 100mm, 150mm, 200mm. These fit straight onto OEM polyimide or simple cathode with no change necessary. The improved design and better material means better process performance and lifetime. Particles are reduced as no sticking or breakdown of polyimide, microarcing…

Ceramic ESC AMAT MxP chambers, all types

CESC technology significantly improves performance on AMAT MxP, MxP+, eMxP+ polyimide ESC chambers. CESC fits onto existing OEM standard or simple cathode, no change necessary. Improved design and materials deliver better process performance, lifetime, reduced particles, eliminates microarcing, better temperature and etch uniformity. Waferless plasma clean now possible with CESC.…

Ceramic ESC Super-e chamber

The latest CESC technology for AMAT Super-e chambers, fits straight onto OEM cathode. Better price, improved design and materials means longer lifetime and no sidewall etching which is seen with OEM plate design. Coulombic design and better material means no dechucking issues from the JR style due to surface condition…

Improved ESC Lam TCP chambers

The latest ESC technology for Lam standalone and cluster tools using 9400 or 9600 chambers. Improved materials means longer lifetime and lower cost of ownership. Using a “donut” design for the cathode, maintains correct leakage current performance. Enquire Equivalent Parts for Flat Type : 718-094523-261, Flat Type : 718-092326-061, Ring…

Ceramic ESC Lam 4520, 4520XL, EXCELAN

Robust and Re-usable Coulombic ESC, made from Al2O3 replaces the OEM Johnson Rahbeck ESC which uses a TiO2 glued plate. This new SSSCo ESC has much better chucking and dechucking performance, and can be recycled and repaired when eventually required. This means much better Cost of Ownership. Coulombic technology means…

Lam Etch

SSSco delivers high quality upgrades and repairs for users of Lam Etch systems, including; Rainbow, Alliance, 2300, 4420, 4520, 9400, 9600, Exelan, Kiyo - mainframe and chambers

HP, HP+, VHP Robot Driver Rebuild and Repair

Standard refurbishment service, with 6 month Warranty Upper/Lower assemblies, HP, HP+, VHP Each unit dissassembled, thoroughly cleaned Magnets, encoders, opto sensors and flags replaced Broken connectors replaced, full assemblies fully tested Additional broken items (such as hard stops, upper motor mounts, etc.), customers are informed after initial evaluation. Including part…

HP Robot Drivers -  Rebuild And Repair - another new service

A new high quality service for another high value module on AMAT systems

New - Ceramic Electro Static Chucks (CESC)

A comprehensive and growing range of the very best CESC products - AMAT, Lam, Novellus, TEL

Improved ESC’s - AMAT, Lam, TEL, SPTS chambers

New, proprietary ESC's for etch and HDPCVD chambers Use existing OEM cathodes, improved performance and cost of ownership Technology details >. AMAT chambers 100mm, 150mm, 200mm MxP (+) DPS WxP (WEB) Super-e EMAX Ultima HDP IPS DPS+ 300mm DPS-2 Ultima HDP LAM chambers 150mm, 200mm 4520 4520XL Excelan 9600, 9400,…

New version of SENTRY software available 1.009

SENTRY 1.009 is now available for download

Down Support Service - ready to install modules

New customer service with high value support equipment

RPS - Remote Plasma Source solutions from SSSco

NF3 cleans for enhanced productivity, better Cost of Ownership, and lower emissionshttps://www.semiconservice.com/platform-specialties/upgrades-retrofits/mks-paragon-rps-upgrade

Repairing PCB’s for AMAT systems - OFFER for end users

More PCB's are being made obsolete by the OEM, and so an effective repair service is essential for end users to maintain systems and avoid unwanted and very expensive OEM upgrades

New Upgrade for HDP chambers

Water Manifold PLUS for ULTIMA and ULTIMA +

Water Manifold PLUS for HDP ULTIMA and ULTIMA+

This part is commonly used and replaced in each HDP chamber. Users can now replace and upgrade with the latest Water Manifold PLUS part from SSSco. The original Teflon type material and design is replaced by durable and clean ceramic type material in a single peice design. This delivers better…

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