Centura Etch
SSSco specialises in AMAT® Centura™ Etch. Etching of metals, oxides, nitrides, silicon, including DPS Metal, DPS Poly, WxP, ASP, MKII, MxP, MxP+ EMxP+, IPS, Super E and Emax
Centura Etch Parts
SSSco in-house design process and custom manufacturing of parts ensures precise process match, and increased reliability. SSSco custom Etch parts include;
Search for more partsEtch Upgrades & Retrofits
Our qualiied upgrades extend lifetime and increase reliability, using three key factors:
- Easy Drop-in replacement capability
- Engineered for improvement by industry experts
- Manufactured to customer requirements
- Ceramic ESC
- Ceramic ESC AMAT DPS+ Metal Etch and Poly Etch
- Ceramic ESC AMAT MxP chambers, all types
- Ceramic ESC AMAT for DPS Metal and Poly Etch Chambers
- Ceramic ESC AMAT for Tungsten Etchback MkII and WEB
- Ceramic ESC Super-e chamber
- DI Resistivity Sensor
- Endpoint Computer - Upgrade, Refurbish and Repair
- Narrow Body Load Lock Wafer Slide Detect Kit
- New V452 Single Board Computer SBC PCB’s
- PDS Penulator Data System
- PDS Remote
- Penulator Pro Monitor now available as Touch
- Penulator™ Upgrades
Services
SSSco's global product support matches customer needs. We partner with customers to deliver our products and support around the world.
- AMAT RF Match Refurbishment
- AMAT0, AMAT1 Heat Exchanger Remanufacturing
- Customer Support Services
- DPS Poly Throttle Valve Rebuild 0010-39645
- Gas line orbital welding service
- HP, HP+ Robot Driver Rebuild and Repair
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- Ion Gauge Power Supply Repair
- Monochromator Refurbishment
- Orienter Chamber Laser Refurbishment
- PCB Repair Service
- SMC Chiller Repair and Refurbishment
Looking for Available Equipment?
SSSco delivers high specification, fu;l;y remanufactured Applied Materials Endura 5500 PVD, Centura 5200 CVD, HDPCVD, RTP, EPI, DPS Etch, Producer and P5000 systems and chambers.
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