Centura Etch
SSSco supports Centura Etch systems and chambers since 2003 including DPS Metal, DPS Poly, WxP, ASP, MKII, MxP, MxP+ EMxP+, IPS, Super E and Emax
Centura Etch Parts
SSSco ensures high quality parts and modules are delivered to precisely match customer requirements. In addition, we have a large inventory of surplus parts in our Parts Search
Search for more partsEtch Upgrades & Retrofits
Improved performance and extended lifetime
- AMAT 0, AMAT 1, Upgrade to new SMC
- Ceramic ESC AMAT DPS+ Metal Etch and Poly Etch
- Ceramic ESC AMAT for DPS Metal and Poly Etch Chambers
- Ceramic ESC AMAT for Tungsten Etchback MkII and WEB
- Ceramic ESC AMAT MxP chambers, all types
- Ceramic ESC Super-e chamber
- DI Resistivity Sensor
- DPS Chamber, Refurbishment of DTCU
- EPC Remote - New Etch Endpoint Computer
- Improved ESC’s - AMAT, Lam, TEL, SPTS chambers
- New Robot Drivers
- New V452 Single Board Computer SBC PCB’s
- PDS Penulator Data System
- PDS Remote
- Penulator Pro Monitor
- Penulator™ Upgrades
- Repairs - Scope of Work
- TGV Throttling Gate Valve Upgrade for DPS Poly
- Upgrade existing Endpoint Computer (EPC) - Centura and P5000
Services
SSSco partners with customers and qualified suppliers to deliver our services around the world.
- AMAT RF Match Refurbishment
- AMAT0, AMAT1 Heat Exchanger Remanufacturing
- Customer Support Services
- DPS Poly Throttle Valve Rebuild 0010-39645
- Endura, Centura 15V DC Power Supply Repair
- Gas line orbital welding service
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- HP, HP+, VHP Robot Driver Rebuild and Repair
- Ion Gauge Power Supply Repair
- Monochromator Refurbishment
- Orienter Chamber Laser Refurbishment
- PCB Repair Service
- Replacement AMAT PCB Circuit Boards
- SMC Chiller Repair and Refurbishment