Centura EPI
SSSco delivers repairs, parts and innovative upgrades for Centura EPI chambers and systems. SSSco has remanufactured and installed EPI systems at leading EPI wafer manufacturers as well as end user factories world wide.
EPI Centura Repairs and Parts
SSSco in-house design process and custom manufacturing of parts is geared to ensure that our unique parts and modules are delivered to precisely match quality and process requirements. Here are some SSSco custom Applied Materials Centura parts.
- Chamber Retrofit
- EPI Lamp Module Repair Service
- HTF Dual Seal Pumps
- HTF Gate Valve and Ball Valve
- HTF Lamp Module Reflectors
- HTF Lamps
- HTF Rotation Assembly
- HTF SCR Drivers
- PDS Drive - replaces floppy U2, adds U4
- Pyrometer
- Replacement Blower
- Replacement Circuit Boards
EPI Centura Upgrades & Retrofits
- Easy Drop-in replacement capability
- Engineered for improvement by industry experts
- Manufactured to customer requirements
- Narrow Body Load Lock Wafer Slide Detect Kit
- New V452 Single Board Computer SBC PCB’s
- PDS Penulator Data System
- PDS Remote
- Penulator Pro Monitor now available as Touch
- Penulator™ Upgrades
Services
SSSco's global network ensures that product support matches customer needs. We deliver our products and support customers around the world.
- Customer Support Services
- Gas line orbital welding service
- HP, HP+ Robot Driver Rebuild and Repair
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- PCB Repair Service
- RPS Astron CIP - Refurbishment and Repair
Looking for Available Equipment?
SSSco delivers remanufactured Applied Materials Endura 5500 PVD, Centura 5200 CVD, HDPCVD, RTP, EPI, DPS Etch, Producer and P5000 systems and chambers. Each system and chamber go through our unique and highly detailed 5S remanufacturing process to ensure consistent quality and reliability.
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