Centura EPI
SSSco supports AMAT EPI systems and chambers since 2003, delivering high value upgrades, repairs, parts and services
EPI Centura Repairs and Parts
SSSco ensures high quality parts and modules are delivered to precisely match customer requirements. In addition, we have a large inventory of surplus parts in our Parts Search
- Chamber Retrofit
- EPI Lamp Module Repair Service
- HTF Dual Seal Pumps
- HTF Gate Valve and Ball Valve
- HTF Lamp Module Reflectors
- HTF Lamps
- HTF Rotation Assembly
- HTF SCR Drivers
- PDS Drive - replaces floppy U2, adds U4
- Pyrometer
- Replacement Blower
EPI Centura Upgrades & Retrofits
Improved performance and extended lifetime
- Narrow Body Load Lock Wafer Slide Detect Kit
- New V452 Single Board Computer SBC PCB’s
- PDS Penulator Data System
- PDS Remote
- Penulator Pro Monitor
- Penulator™ Upgrades
Services
SSSco partners with customers and qualified suppliers to deliver our services around the world.
- Customer Support Services
- Gas line orbital welding service
- Heat Exchanger and Chiller Remanufacture - 1 Year Warranty
- HP, HP+, VHP Robot Driver Rebuild and Repair
- PCB Repair Service
- Replacement AMAT PCB Circuit Boards
- RPS Astron CIP - Refurbishment and Repair